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1.Application:
The equipment is batch type induction furnace, mainly used for CVD in carbon carbon material and carbon composite material or graphite parts material.
2.Configuration:
380V±5%，50Hz/60Hz 3 phase 5 wire
One control cabinet to one furnace, the facility equipped of mixed gas control system, cooling tower for optional.
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Model Parameter |
Lab usage |
Production usage |
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NTI-CJL-42L |
NTI-CJL-100L |
NTI-CJL-196L |
NTI-CJL-339L |
NTI-CJL-803L |
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Working size |
mm |
300×600 |
400x800 |
500×1000 |
600x1200 |
800x1600 |
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Heating type |
/ |
IF induction heating |
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Crucible |
/ |
Graphite |
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Control type |
/ |
Thyristor control or IGBT control ( optional ) |
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HT zone capacity |
L |
42 |
100 |
196 |
339 |
803 |
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Loading weight |
g |
HT zone capacity × density (g/cm3)×1000 Remark：1L=1000cm3 |
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Ultimate vacuum |
Pa |
50 |
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IF power |
Kw |
100 |
150 |
200 |
250 |
350 |
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Max. working temperature |
℃ |
2500 |
2500 |
2500 |
2500 |
2500 |
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Vapor deposition temperature |
℃ |
Within 2000℃ |
Within 2000℃ |
Within 2000℃ |
Within 2000℃ |
Within 2000℃ |
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Temperature uniformity |
℃ |
±5 |
±5 |
±10 |
±10 |
±10 |
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Overall dimension |
mm |
5000x6000 |
5500x6500 |
6000x7000 |
6500x7500 |
7000x8000 |
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Weight |
Kg |
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Working environment |
/ |
Vacuum, Argon, Nitrogen, Hydrogen atmosphere protection |
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Vapor deposition environment |
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300-3000pa air pressure, charging into CH?CH?CH?, CH4, C3H6. |
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